Xiaoyan Chen,Jianyong Chen, Chundong Zhao
Pages 45-48
Abstract
Wafer defect detection is an indispensable part of semiconductor manufacturing. In this paper, an automatic and efficient device is designed and constructed to detect wafer physical defects. Programmable logic controllers (PLCs) are used as the controller of the transmission mechanism of the device, and the servo motor is used for driving. Wafer images are captured by a CMOS camera. In addition, in order to improve the detection accuracy, the camera calibration is completed according to the mapping relationship between the pixel coordinate system and the world coordinate system. A computer is adopted for wafer image processing and displaying the final detection results. The device proposed in this paper has low cost and high reliability. It provides a new solution for wafer defect detection.
Keywords:Semiconductor manufacturing, Machine vision, Camera calibration, Programmable logic controller